in water Si substrate immersed in hot (333 K) H2O-soln. of poly(vinyl alcohol), then dried on a hot-plate at 333 K 10 min, pyrolysis under He at 60 Torr, total flow rate: 100 standard cm**3/min, temp. increased 513-843 K in 2 h and reduced to room temp. in 2 h;
参考文献
Physica Status Solidi (A) Applied Research, , vol. 182, # 1 p. 395 - 400
