反应条件
in gaseous matrix byproducts: H2; 1/10 mixt. of SiH4/He, 0.5-1.0 mTorr, collision with metastable Ar atoms; detected by emission spectroscopy;
参考文献
Tsuji, Masaharu; Kobarai, Kazunari; Yamaguchi, Sumio; Obase, Hiroshi; Yamaguchi, Kazuo; Nishimura, Yukio
Chemical Physics Letters, 1989 , vol. 155, p. 481 - 485