参考文献
ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD.; KANG, Hyun-Ju; MOON, Doo-Hyeon; KANG, Hee-Ryong; YOON, Seok-Keun; KIM, Nam-Kyun; LEE, Seon-Woo; KWON, Hyuck-Joo; LEE, Kyung-Joo; KIM, Bong-Ok
Patent: WO2014/88290 A1, 2014 ;
Location in patent: Paragraph 105; 106; 107; 108 ;