1: ruthenium trichloride; 5-EtCp; 1-methyl-2,4-cyclopentadiene With triphenylphosphine in ethanol 2 h; Heating / reflux; 2: lithium ethylcyclopentadienide in tetrahydrofuran 4 h; Heating / reflux;

1: RuCp2 With n-butyllithium in tetrahydrofuran; hexane; water T=-78 - 20°C; 27 h; 2: ethyl bromide in tetrahydrofuran; hexane T=-78 - 20°C; 27 h;

in tetrahydrofuran

in not given ligand exchange reation;;

ammonia in gas plasma-enhanced atomic layer deposition by pulse of Ru(EtCp)2, pulse of Ar, pulse of NH3 plasma, and second pulse of Ar per cycle; at 270°C;